Precision at the Nanometer Scale
Fiber Optic Solutions
Optical Fibers for Precision in Micro-
and Nanostructuring
Semiconductor manufacturing demands absolute accuracy: every light pulse must be perfectly aligned with maximum precision. Our optical fibers for the semiconductor industry meet these requirements reliably, as processes such as lithography, wafer inspection, plasma etching or deposition place extreme demands on transmission stability and durability. Even minor deviations can affect process quality and lead to costly production issues.
Typical Fiber Requirements
- High transmission in the UV and VUV range
- Reliable performance under cleanroom conditions
- Stable operation with high laser power in continuous use
- Resistance to thermal and chemical stress
CeramOptec Solutions –
The First Choice in Semiconductors
Our Optran® fiber solutions ensure maximum precision, minimize downtime and increase overall process stability: decisive factors in an industry where every step counts.
- Excellent transmission from DUV to NIR: ideal for lithography, inspection and high-precision metrology
- UV & VUV resistant: long-term stable and solarization-resistant
- Non-circular geometries: rectangular, square or linear profiles for homogenized and application-optimized beam profiles
- High durability: robust against heat and chemicals, suitable for plasma processes
FAQ – Frequently Asked Questions
How do you ensure cleanroom compatibility?
Our OEM assemblies are manufactured under controlled production conditions and packaged particle-free, enabling seamless integration into sensitive cleanroom environments. This guarantees the highest standards of cleanliness and process security.
Are CeramOptec fibers suitable for plasma or high-energy processes?
Yes. With special aluminum coatings, our fibers are reliably protected against extreme heat, plasma exposure and aggressive chemicals. They maintain their performance even in the harshest conditions, making them ideal for high-energy and plasma processes.
Can fibers be customized for lithography systems?
Absolutely. We design tailored solutions with geometries, NA values, coatings and connectors adapted precisely to your lithography system requirements – ensuring fibers that integrate perfectly into your processes.
How do you ensure consistency between prototypes and series production?
Thanks to complete in-house manufacturing, we monitor every process step closely. This guarantees consistently high quality across all batches. Every delivery is documented, tested and fully traceable – ensuring maximum transparency and reliability from prototype to volume production.
